| Autor: |
Oliver Brand, Luke A. Beardslee, S. Truax, J.-J. Su, K.S. Demirci |
| Rok vydání: |
2011 |
| Předmět: |
|
| Zdroj: |
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference. |
| DOI: |
10.1109/transducers.2011.5969285 |
| Popis: |
This paper presents a chemical microsystem based on the integration of a silicon-based resonant microsensor and a CMOS ASIC for portable sensing applications in air. Cantilever-based microresonators coated with chemically-sensitive polymer films are used as microsensors. The CMOS ASIC utilizes the self-oscillation method, which uses an amplifying feedback loop. For improved short- and long-term frequency stabilities, the ASIC also includes several control circuits such as an automatic gain control loop, an automatic phase control loop, and a frequency drift compensation loop. The performance of the implemented microsystem has been evaluated experimentally by detecting various volatile organic compounds. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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