Deposition of preferred-orientation ZnO films on the ceramic substrates and its application for surface acoustic wave filters
| Autor: | Walter Water, Sheng-Yuan Chu, Te Yi Chen |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Electromechanical coupling coefficient
Materials science Argon Interdigital transducer business.industry Scanning electron microscope Surface acoustic wave Analytical chemistry chemistry.chemical_element Surfaces and Interfaces Sputter deposition Condensed Matter Physics Surfaces Coatings and Films chemistry visual_art visual_art.visual_art_medium Optoelectronics Ceramic business Temperature coefficient |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:1087-1092 |
| ISSN: | 1520-8559 0734-2101 |
| DOI: | 10.1116/1.1738653 |
| Popis: | Polycrystal ZnO films with c-axis (002) orientation have been successfully grown on the lead-based ceramic substrates by rf magnetron sputtering technique. The deposited films were characterized as a function argon-oxygen gas flow ratio and rf power. Crystalline structures of the films were investigated by x-ray diffraction, scanning electron microscopy, and atomic force microscopy. Highly oriented films with c-axis normal to the substrates can be obtained by depositing under a total pressure of 10 mTorr containing 50% argon and 50% oxygen and rf power of 70 W. The phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency of surface acoustic wave (SAW) device with ZnO/IDT/PT (IDT: interdigital transducer; PT:PbTiO3 ceramics) structure were investigated. It shows that the preferred oriented ZnO film is beneficial for improving the electromechanical coupling coefficient of SAW device. |
| Databáze: | OpenAIRE |
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