RF MEMS capacitive shunt switch for low loss applications

Autor:	Kanaka Joy, Anurag Swarnkar, M S Giridhar, Amitava DasGupta, Deleep R Nair
Rok vydání:	2023
Předmět:	Mechanics of Materials Mechanical Engineering Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
Zdroj:	Journal of Micromechanics and Microengineering. 33:034004
ISSN:	1361-6439 0960-1317
DOI:	10.1088/1361-6439/acb58c
Popis:	Radio frequency (RF) microelectromechanical system capacitive shunt switch with metal-to-metal contact is designed, fabricated and tested with the aim of having very low insertion loss (
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::70aa24735988235e82d5e4a870c12282 https://doi.org/10.1088/1361-6439/acb58c Zobrazit plný text záznamu