Calculation of Bremsstrahlung Spectra for Multilayer Samples

Autor: Johann Wernisch, Christian Schiebl, Arnold Pfeiffer
Rok vydání: 1996
Předmět:
Zdroj: Microbeam and Nanobeam Analysis ISBN: 9783211828748
DOI: 10.1007/978-3-7091-6555-3_38
Popis: Investigations and new developments of a simple multiple electron scattering model by August are the basis for further calculations of characteristic and continuous depth distribution functions. The validity of the predicted depth distributions has been demonstrated by comparisons with other models. Therefore, application of the simple electron scattering model in correction programs for the determination of elemental concentrations and film thicknesses is justified. Within the scope of these correction calculations, accurate knowledge of the excited breamsstrahlung spectrum is essential for quantitative analysis, especially in the field of EDS and peak-to-background measurements. Using the description of the continuous depth distribution, a calculation method for breamsstrahlung spectra applicable to any bulk or multilayer sample is presented.
Databáze: OpenAIRE