Characterization of the Co-Silicide Penetration Depth into the Junction Area

Autor:	Jung-Hoon Choi, Young-Jin Park, Keun-Koo Kang, Hi-Deok Lee, Key-Min Lee, Ki-Seok Yoon, Myoung-Jun Jang, Geun-Suk Park, Seong-Hyun Park, Joo-Hyoung Lee
Rok vydání:	2001
Předmět:	chemistry.chemical_compound Materials science chemistry business.industry Silicide Optoelectronics Nanotechnology business Penetration depth Junction area Characterization (materials science)
Zdroj:	Extended Abstracts of the 2001 International Conference on Solid State Devices and Materials.
DOI:	10.7567/ssdm.2001.b-5-3
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::705f564b14381ab36667cf58fc3614d4 https://doi.org/10.7567/ssdm.2001.b-5-3 Zobrazit plný text záznamu