The structural and piezoelectric properties of epitaxial AℓN on Aℓ2O3
| Autor: | J. E. Coker, F. A. Pizzarello |
|---|---|
| Rok vydání: | 1975 |
| Předmět: |
Electromechanical coupling coefficient
Materials science Solid-state physics Analytical chemistry Chemical vapor deposition Condensed Matter Physics Epitaxy Piezoelectricity Electronic Optical and Magnetic Materials law.invention law Materials Chemistry Electrical and Electronic Engineering Facet Electron microscope |
| Zdroj: | Journal of Electronic Materials. 4:25-36 |
| ISSN: | 1543-186X 0361-5235 |
| DOI: | 10.1007/bf02657834 |
| Popis: | The piezoelectric properties of epitaxial AlN films grown by the method of chemical vapor deposition utilizing trimethylaluminum and ammonia as chemical reactants were investigated. Large variations of the measured electromechanical coupling coefficient, k2, were found in different regions of the same sample and on different samples having approximately the same h/λ value. Electron microscope observations of replicated as-grown and etched surfaces of epitaxial AlN were used to show a relationship between surface facet ordering and the magnitude of k2. A plot of k2 measured at various h/λ values shows k2 as large as 0.6% for films grown at a rate of ˜0.2 µm/min and measured at ˜400 MHz. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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