Aluminum Oxide Thin Films from Aqueous Solutions: Insights from Solid-State NMR and Dielectric Response
| Autor: | Catherine J. Page, Shannon W. Boettcher, Zayd L. Ma, Sophia E. Hayes, Douglas A. Keszler, Keenan N. Woods, Cory K. Perkins, Jinlei Cui, Yvonne Afriyie, Blake A. Hammann, Matthew G. Kast, Paul N. Plassmeyer |
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| Rok vydání: | 2018 |
| Předmět: |
inorganic chemicals
Aqueous solution Materials science General Chemical Engineering Condensation chemistry.chemical_element 02 engineering and technology General Chemistry Dielectric Atmospheric temperature range 010402 general chemistry 021001 nanoscience & nanotechnology complex mixtures 01 natural sciences 0104 chemical sciences Amorphous solid chemistry Solid-state nuclear magnetic resonance Chemical engineering Aluminium Materials Chemistry Thin film 0210 nano-technology |
| Zdroj: | Chemistry of Materials. 30:7456-7463 |
| ISSN: | 1520-5002 0897-4756 |
| DOI: | 10.1021/acs.chemmater.7b05078 |
| Popis: | Here, we employ a combination of 27Al solid-state nuclear magnetic resonance (SSNMR) and conventional spectroscopic and microscopic techniques to investigate the structural evolution of aqueous aluminum precursors to a uniform and smooth aluminum oxide film. The route involves no organic ligands and relies on dehydration, dehydroxylation, and nitrate loss for condensation and formation of the three-dimensional aluminum oxide structure. Local chemical environments are tracked as films evolve over the temperature range 200–1100 °C. 27Al SSNMR reveals that Al centers are predominantly four- and five-coordinate in amorphous films annealed between 200 and 800 °C and four- and six-coordinate in crystalline phases that form above 800 °C. The Al coordination of the aqueous-deposited aluminum oxide films are compared to data from SSNMR studies on vapor-phase-deposited aluminum oxide thin films. Additionally, dielectric constants of aluminum oxide-based capacitors are measured and correlated with the SSNMR results.... |
| Databáze: | OpenAIRE |
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