Optical, structural and electrical properties of tin oxide films prepared by magnetron sputtering
| Autor: | D.M. Mukhamedshina, N.B. Beisenkhanov, K.A. Mit, I.A. Karapatnitski |
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| Rok vydání: | 2002 |
| Předmět: |
Materials science
Mineralogy Corundum Surfaces and Interfaces General Chemistry Sputter deposition engineering.material Condensed Matter Physics Tin oxide Surfaces Coatings and Films Carbon film Electrical resistivity and conductivity Physical vapor deposition Cavity magnetron Materials Chemistry engineering Thin film Composite material |
| Zdroj: | Surface and Coatings Technology. :76-81 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/s0257-8972(01)01611-5 |
| Popis: | Films with thickness of 150–450 nm were deposited at a rate of 0.5 A/s in an argon–oxygen atmosphere on polycrystalline corundum, quartz and glass slides. The films were annealed in air at temperature 550 °C for 0.5, 1, 2, 4 and 8 h to stabilize their parameters. A correlation between the electrical resistivity and optical and structural properties of the films was found. Transparent films for wavelengths in the range 200–1200 nm as well as gas-sensitive films for sensors were obtained. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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