| Autor: | R M Wolf, D K G De Boer, A. J. G. Leenaers |
|---|---|
| Rok vydání: | 1995 |
| Předmět: |
geography
geography.geographical_feature_category Acoustics and Ultrasonics Condensed matter physics business.industry Chemistry X-ray X-ray fluorescence Surface finish Condensed Matter Physics Layer thickness Reflectivity Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Terrace (geology) Specular reflection business Reflectometry |
| Zdroj: | Journal of Physics D: Applied Physics. 28:A227-A230 |
| ISSN: | 0022-3727 |
| DOI: | 10.1088/0022-3727/28/4a/044 |
| Popis: | The possibilities for the investigation of thin-layered samples by specular and non-specular X-ray reflectivity and angle-dependent X-ray fluorescence are shown. As an example, measurements on an oxidic multilayer are discussed. Layer thickness, interface roughness and conformality, as well as compound formation at the interfaces, are found in an unambiguous way. Also, the lateral structure of the interface roughness can be described and is tentatively interpreted in terms of terrace widths. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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