Low-Temperature Solid Phase Epitaxial Regrowth of Silicon for Stacked Static Random Memory Application

Autor:	Kong-Soo Lee, Chadong Yeo, Dae-Han Yoo, Seok-Sik Kim, Joo-Tae Moon, Soon-Moon Jung, Yong-Hoon Son, Hyunho Park, Hanwook Jeong, Kwang-Ryul Kim, Byoungdeog Choi
Rok vydání:	2011
Předmět:	Physics and Astronomy (miscellaneous) General Engineering General Physics and Astronomy
Zdroj:	Japanese Journal of Applied Physics. 50:01AB06
ISSN:	1347-4065 0021-4922
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::702921a556a3c8894e00c82b3aa2789a https://doi.org/10.7567/jjap.50.01ab06 Zobrazit plný text záznamu