In Situ Gas Phase Diagnostics for Hafnium Oxide Atomic Layer Deposition
| Autor: | James E. Maslar, W.S. Hurst, D.R. Burgess, William Kimes, Nhan V. Nguyen, E.F. Moore |
|---|---|
| Rok vydání: | 2008 |
| Zdroj: | ECS Meeting Abstracts. :711-711 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2008-01/18/711 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|