HBM and CDM ESD Performance of Advanced Silicon Photonic Components

Autor: Phoumra Tan, Marko Simicic, Yoojin Ban, Artemisia Tsiara, Peter De Heyn, Xin Wu, Michael J. Hart, Joris Van Campenhout, Kristof Croes, James Karp, Dimitri Linten, Shih-Hung Chen, Jonathan Chang, Dean Tsaggaris
Rok vydání: 2021
Předmět:
Zdroj: 2021 43rd Annual EOS/ESD Symposium (EOS/ESD).
Popis: ESD robustness for self-protected advanced Silicon photonic components integrated into optical interposers is reported, including industry-first CDM data. HBM performance in reverse bias polarity is shown to be the limiting factor and is correlated to the optical component width. The Ge-EAM modulator with heater is found to be the weakest element CDM-wise.
Databáze: OpenAIRE