200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

Autor:	M. Guillorn, Deqiang Wang, Steve Rossnagel, Lynne Gignac, Qinghuang Lin, Sung-Wook Nam, Ajay K. Royyuru, Robert L. Bruce, Gustavo Stolovitzky, P. J. Litwinowicz, Armand Galan, Dirk Pfeiffer, Evan G. Colgan, Ronald D. Goldblatt, S. Papa Rao, J.J. Bucchignano, Markus Brink, Michael F. Lofaro, Chao Wang, W. H. Advocate, Elizabeth A. Duch, E. Kratschmer, C. M. Breslin, John M. Cotte, William Henry Price, Christopher V. Jahnes, Stas Polonsky, Hongbo Peng, Eric A. Joseph
Rok vydání:	2013
Předmět:	Materials science Wafer-scale integration Silicon technology industry and agriculture chemistry.chemical_element Nanofluidics Nanotechnology Lab-on-a-chip law.invention chemistry.chemical_compound chemistry Optical microscope law Fluorescence microscope Molecule DNA
Zdroj:	2013 IEEE International Electron Devices Meeting.
Popis:	We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF2 to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7009e4a7a92742f8a8752e24815c32d7 https://doi.org/10.1109/iedm.2013.6724627 Zobrazit plný text záznamu