Numerical solution of the initial boundary value problems of radio-frequency capacitive coupled discharge
Autor: | V. S. Zheltukhin, V. Ju Chebakova, I. B. Badriev |
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Rok vydání: | 2017 |
Předmět: |
Physics
History Acoustics Capacitive sensing 0211 other engineering and technologies Control engineering 02 engineering and technology Computer Science Applications Education 020303 mechanical engineering & transports 0203 mechanical engineering 021105 building & construction Radio frequency Boundary value problem |
Zdroj: | Journal of Physics: Conference Series. 927:012008 |
ISSN: | 1742-6596 1742-6588 |
DOI: | 10.1088/1742-6596/927/1/012008 |
Databáze: | OpenAIRE |
Externí odkaz: |