Evaluation of Lead Zirconate-Titanate Ceramic Target for Sputter Deposition of Films for Use in Ferroelectric Capacitors
| Autor: | Nobuo Kamehara, Satsuki Nagayama, Jeffrey S. Cross, Mineharu Tsukada, Yasuyuki Goto |
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| Rok vydání: | 2005 |
| Předmět: |
Marketing
Materials science Metallurgy Analytical chemistry Substrate (electronics) Sputter deposition Condensed Matter Physics Lead zirconate titanate Ferroelectricity law.invention chemistry.chemical_compound Capacitor chemistry Sputtering law visual_art Materials Chemistry Ceramics and Composites visual_art.visual_art_medium Wafer Ceramic |
| Zdroj: | International Journal of Applied Ceramic Technology. 2:256-261 |
| ISSN: | 1744-7402 1546-542X |
| DOI: | 10.1111/j.1744-7402.2005.02019.x |
| Popis: | A high-density 3 in. diameter (Pb,La)(Zr,Ti)O3 [PLZT] ceramic target containing 20% excess PbO was sputtered by radio-frequency magnetron sputtering to deposit films containing excess Pb and evaluated with respect to target stability for use in the mass production of ferroelectric memories on Si wafers. The results indicated that PLZT film deposition rate increased with power but the excess PbO content correspondingly decreased. The Pb loss in the films was attributed to secondary preferential sputtering of film substrate in the plasma. Regardless of this difference, excess PbO containing 12 in. diameter PLZT ceramic targets were evaluated in a commercial sputtering system over a period of 7 months and the film Pb content was stable within ±1%. |
| Databáze: | OpenAIRE |
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