Ultra-Low Profile Integrated Magnetic Inductors and Transformers for HF Applications
| Autor: | Jean-Philippe Michel, Rachid Hida, Erwan Bruno, Anne-Sophie Berneux-Dugast, Patrick Poveda, Bernard Viala, H. Sibuet, Claudiu V. Falub, Nicolas Buffet, Jean-Claude Bastien |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science business.industry chemistry.chemical_element Inductor 01 natural sciences Copper Electronic Optical and Magnetic Materials Amorphous solid law.invention Inductance Back end of line chemistry law Magnet 0103 physical sciences Optoelectronics Wafer Electrical and Electronic Engineering business Transformer |
| Zdroj: | IEEE Transactions on Magnetics. 55:1-7 |
| ISSN: | 1941-0069 0018-9464 |
| Popis: | Ultra-low profile integrated magnetic solenoid inductors and transformers were fabricated on 200 mm wafers with back end of line (BEOL) techniques. The process uses thick copper metallization, polymer coating, and laminated amorphous Co–Zr–Ta magnetic material. The substrate was thinned to obtain an inductor thickness of $150~\mu \text{m}$ . By varying the core size and winding pitch, a large set of inductance values was obtained, from 20 to 500 nH in the 1 MHz to 3 GHz frequency range. We report a record inductance surface density of $3500\,\,\text {nH}\cdot \text {mm}^{\mathrm {-2}}$ and quality factors up to 23, and transformers with high coupling factors (>0.95). |
| Databáze: | OpenAIRE |
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