Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation

Autor:	Wei-Zhi Huang, Jhong-Wei Wu, Han-Ping D. Shieh, Yi Chiu, Jin-Chern Chiou
Rok vydání:	2008
Předmět:	Fabrication Materials science Wafer bonding Hardware_INTEGRATEDCIRCUITS Silicon on insulator Wafer Nanotechnology Hardware_PERFORMANCEANDRELIABILITY Hardware_CONTROLSTRUCTURESANDMICROPROGRAMMING
Zdroj:	2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics.
Popis:	Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6fd8bea0d645a970b3ea1291d5371614 https://doi.org/10.1109/omems.2008.4607853 Zobrazit plný text záznamu