Simulation of Process of Solid Particles Sputtering with Dimet Nozzle

Autor:	A. I. Dolmatov, O. V. Bilchuk
Rok vydání:	2019
Předmět:	Materials science Chemical engineering Solid particle Sputtering General Mathematics Scientific method Nozzle Metals and Alloys Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	METALLOFIZIKA I NOVEISHIE TEKHNOLOGII. 41:927-940
ISSN:	1024-1809
DOI:	10.15407/mfint.41.07.0927
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6fbc41c41c0e9463d62d9423791c741b https://doi.org/10.15407/mfint.41.07.0927 Zobrazit plný text záznamu