Infrared response of vanadium oxide (VOx)/SiNx/reduced graphene oxide (rGO) composite microbolometer
| Autor: | Yau-Tang Gau, Hong-Yuan Zeng, Zheng-Yuan Wu, Wen-Jen Lin, Shiang-Feng Tang, Tzu-Chiang Chen |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Amorphous silicon
Materials science Infrared Composite number Oxide 02 engineering and technology 010402 general chemistry 01 natural sciences Vanadium oxide law.invention chemistry.chemical_compound Responsivity law Electrical and Electronic Engineering Safety Risk Reliability and Quality Graphene business.industry Microbolometer 021001 nanoscience & nanotechnology Condensed Matter Physics Atomic and Molecular Physics and Optics 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Optoelectronics 0210 nano-technology business |
| Zdroj: | Microelectronics Reliability. 91:313-318 |
| ISSN: | 0026-2714 |
| Popis: | Much attention has been paid to the photoresponse of vanaduim oxide (VOx) and amorphous silicon based microbolometer for long-wavelength infrared detection under un-cooled operation condition in recent decades. However, the outstanding physical and chemical properties of graphene and reduced graphene oxide (rGO) stimulate their potential for use in light-sensitive applications. Much less attention has been paid to investigate the performance on long-wavelength infrared detection of microbolometer using reduced graphene oxide/SiNx/vanadium oxide composite films deposited on under room temperature operation. In the research, we have proposed the novel microbolometer based on VOx/SiNx/rGO composite films replace the as-deposited VOx based microbolometer. It is noted that such extraordinary properties (high responsivity: 18,130 V/W and low NETD: 43.32 mK) of the VOx/SiNx/rGO composite presented here encourage us to contemplate on this protocol for next generation optoelectronic device engineering for infrared detection. |
| Databáze: | OpenAIRE |
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