Staining-free observation of polymer blend thin films on transmission extreme ultraviolet microscopy

Autor: Jun Chen, Toshiyuki Kakudate, Shiori Gondai, Mitsunori Toyoda, Shunsuke Aizawa, Hiroshi Jinnai, Masaki Ageishi
Rok vydání: 2020
Předmět:
Zdroj: Applied Physics Express. 13:082011
ISSN: 1882-0786
1882-0778
DOI: 10.35848/1882-0786/aba882
Popis: Transmission extreme ultraviolet microscopy is applied to the staining-free observation of a poly(styrene–methyl methacrylate) (PS/PMMA) blend. At a photon energy of 92 eV, the imaginary part of the atomic scattering factor for oxygen, which represents the absorption, is four-times larger than that of carbon, and microstructures can be visualized by the contrast resulting from the presence of oxygen. Based on the signal to noise ratio of the images, we consider the optimum photon energy and sample thickness for common polymer blends. Finally, a practical high contrast of 30% is successfully demonstrated for the PS/PMMA thin film.
Databáze: OpenAIRE