Bi4-xLaxTi3O12 Ferroelectric Thin Films Prepared by RF Magnetron Sputtering

Autor: Zu Li Liu, Zuo Bin Yuan, Jian Ping Yang, An You Zuo, Xing Ao Li, Kai Lun Yao
Rok vydání: 2008
Předmět:
Zdroj: Key Engineering Materials. :109-111
ISSN: 1662-9795
DOI: 10.4028/www.scientific.net/kem.368-372.109
Popis: Bi4-xLaxTi3O12 (BLT) ferroelectric thin films were deposited on Pt/Si substrates by RF magnetron sputtering with Bi4-xLaxTi3O12 (x=0.5, 0.75, 1) targets with 50-mm diameter and 5-mm thickness. The effects of La contents on microstructure and ferroelectric properties of Bi4-xLaxTi3O12 thin films were investigated. The grain growth behavior and ferroelectric properties such as remanent polarization were found to be dependent on the La contents in the BLT thin films.
Databáze: OpenAIRE