Development of UV-LIGA contact probe

Autor: Kuo-Yu Lee, Jung-Tang Huang, Hou-Jun Hsu, Ting-Chiang Tsai
Rok vydání: 2012
Předmět:
Zdroj: 2012 7th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT).
DOI: 10.1109/impact.2012.6420275
Popis: In recent years, as mobile equipment such as cellular phones and PDAs become drastically higher performance and downsized, semiconductor devices are rapidly becoming more integrated and higher speed. As a result of high integration, the pitches of electrode pads in chips are becoming smaller than 100 µm. In some devices, pad pitches are as small as 40 µm.
Databáze: OpenAIRE