Pressure and temperature determination with micromachined GAN/SI SAW based resonators operating in the GHZ frequency range
| Autor: | Ioana Giangu, G. Stavrinidis, Mircea Pasteanu, Alexandru Muller, Alexandra Stefanescu, George Konstantinidis, Antonis Stavrinidis, Adrian Dinescu |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Range (particle radiation) Materials science business.industry Surface acoustic wave Analytical chemistry 02 engineering and technology Atmospheric temperature range 021001 nanoscience & nanotechnology 01 natural sciences Pressure range Resonator symbols.namesake Surface micromachining 0103 physical sciences symbols Optoelectronics Rayleigh scattering 0210 nano-technology business Bar (unit) |
| Zdroj: | 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). |
| DOI: | 10.1109/transducers.2017.7994238 |
| Popis: | This paper describes the experimental development of membrane supported single SAW resonator sensor structures, operating in the 4–12 GHz frequency range. The sensors are manufactured on GaN/Si, using advanced nano-lithographic and micromachining techniques. Rayleigh and Lamb resonance frequency peak shifts vs. pressure and temperature were successfully used for simultaneous determinations of these parameters. Determinations have been performed in the 1–7 Bar pressure range and 20–150°C temperature range. Very high values for the pressure and temperature sensitivities have been obtained, due to the high frequency operation, possible for GaN based SAW type sensors. |
| Databáze: | OpenAIRE |
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