An integrated solid-state solution for secondary electron detection

Autor:	Joon Huang Chuah, David M. Holburn
Rok vydání:	2013
Předmět:	Transimpedance amplifier Physics Photomultiplier Cost effectiveness Detector Optical power Integrated circuit Surfaces Coatings and Films law.invention CMOS Hardware and Architecture law Signal Processing Electronic engineering Voltage
Zdroj:	Analog Integrated Circuits and Signal Processing. 79:395-411
ISSN:	1573-1979 0925-1030
DOI:	10.1007/s10470-013-0234-4
Popis:	In this paper, a novel integrated solid-state solution is proposed to replace the vacuum-based photomultiplier tube and other constituent components of the Everhart–Thornley detector, which has been widely used for secondary electron detection in scanning electron microscopy. Compared to the conventional setup, this integrated circuit offers potential merits such as higher cost effectiveness, smaller dimensions, lower voltage and power requirements, and better circuit integration. It was designed and fabricated in an optically-enhanced Austriamicrosystems 0.35 μm CMOS process technology. Results from simulations and experiments have shown that the solid-state detector can operate with a maximum transimpedance gain of 170 dBΩ and minimum bandwidth of 3.6 MHz. It can detect signals with optical power as low as 10 nW while giving a minimum signal-to-noise ratio of 24 dB regardless of gain configuration.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6f0dc217b975d6a165a54fede2ee53c1 https://doi.org/10.1007/s10470-013-0234-4 Zobrazit plný text záznamu Full text from SpringerLink