A Concentric Circular Type in-situ Vacuum Sealed Lateral Feas Employing E-Beam Evaporator

Autor: Yearn-Ik Choi, Min-Koo Han, Moo-Sup Lim
Rok vydání: 2000
Předmět:
Zdroj: MRS Proceedings. 621
ISSN: 1946-4274
0272-9172
DOI: 10.1557/proc-621-r5.3.1
Popis: In this paper, we propose concentric circular lateral field emitter structure which is more sstable in fabricating and maintaining vacuum conditions. The new FEAs have concentric circular shape while our previous FEAs are stripe type. The anode is formed at inner circle and the cathode is outer circle respectively. We use Molybdenum or Silicon dioxide as a sealing material. After we fabricating tips, Molybdenum or Silicon dioxide is deposited with e-beam evaporator at base pressure of 3.5×10−6Torr. In this process, the micro-cavity remains vacuum cavity without filling Molybdenum or oxide due to step coverage of evaporation. It should be noted that the vacuum level of the micro-cavity can be identical to the base pressure of the e-gun evaporator chamber. All of the two types of new FEAs show good reproducibility in fabricating and maintaining vacuum conditions. Field emitter structure that the anode is located at inner circle shows superior field emission characteristics. The measurements of long term stability for the anode current show that oxide is the most promising material for in-situ vacuum sealing.
Databáze: OpenAIRE
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