Mitigation of UV-Induced Propagation Loss in PECVD Silicon Nitride Photonic Waveguides
| Autor: | Pieter Neutens, Monika Rutowska, Willem Van Roy, Pol Van Dorpe, Federico Buja, Roelof Jansen |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Annealing (metallurgy) Population 02 engineering and technology medicine.disease_cause 01 natural sciences law.invention chemistry.chemical_compound law Plasma-enhanced chemical vapor deposition 0103 physical sciences medicine Electrical and Electronic Engineering education 010302 applied physics education.field_of_study business.industry 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Silicon nitride chemistry Optoelectronics Photonics 0210 nano-technology business Waveguide Ultraviolet Biotechnology Visible spectrum |
| Zdroj: | ACS Photonics. 5:2145-2150 |
| ISSN: | 2330-4022 |
| Popis: | We observe a drastic increase in propagation loss at visible wavelengths in PECVD silicon nitride waveguides after exposure to ultraviolet (UV) light. Low temperature annealing or high intensity optical exposure at visible wavelengths brings the propagation loss back toward the original value before UV exposure or even lower. We postulate that these effects can be explained by the population and depopulation of defect centers in the silicon nitride. We demonstrate the importance of defect depopulation before using waveguides in any silicon nitride based visible photonic application and provide a cleaning procedure that yields reproducible, low-loss, initial waveguide conditions. |
| Databáze: | OpenAIRE |
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