Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils
| Autor: | Song Won Ko, Nikolas J. Podraza, T. Clark, Clive A. Randall, Michael A. Motyka, Susan Trolier-McKinstry, Adarsh Rajashekhar, Weiguo Qu, S. S. N. Bharadwaja |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science Excimer laser Electron energy loss spectroscopy medicine.medical_treatment Analytical chemistry General Physics and Astronomy 02 engineering and technology 021001 nanoscience & nanotechnology Laser 01 natural sciences Electron spectroscopy law.invention law Ellipsometry 0103 physical sciences medicine Dielectric loss Thin film 0210 nano-technology FOIL method |
| Zdroj: | Journal of Applied Physics. 119:024106 |
| ISSN: | 1089-7550 0021-8979 |
| Popis: | Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3 thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values |
| Databáze: | OpenAIRE |
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