Formation of fast neutral beams and their using for selective etching

Autor:	V. P. Kudrya, S. L. Shevchuk, Yu. P. Maishev
Rok vydání:	2014
Předmět:	Physics::Instrumentation and Detectors Magnetism chemistry.chemical_element Electron Ion law.invention Magnetic field chemistry law Etching (microfabrication) Physics::Accelerator Physics Cold cathode Atomic physics Tin Beam (structure)
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.2180434
Popis:	Design and main characteristics of high performance fast neutral beam sources based on the ion sources with a cold cathode and a closed drift of electrons in crossed electrical and magnetic fields are described. The output beam is of practically 100% neutrality and has a low level of divergence (
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6e50301e3b5ae43746a40b9520f306c4 https://doi.org/10.1117/12.2180434 Zobrazit plný text záznamu