| Popis: |
Finite element method (FEM) is used to simulate and investigate the surface acoustic wave (SAW) devices using aluminum for the transducers and 41° rotated Y-cut Lithium Niobate (Y+41 LiNbO 3 ) for the substrate. For accuracy in the evaluation of modeling with a FEM, fundamental design parameters of a resonator, like surface velocity, electromechanical coupling coefficient and reflectivity is computed and compared to literature and experimental results. The effects of mass load of IDT, number of IDT and depth of substrate on the performance of SAW device are investigated. The results showed that the metallization ratio and electrode height have a significant effect on resonance frequency and SAW phase velocity. |
