(Invited) Magnetic Micro and Nano Actuator Systems

Autor:	Hans H. Gatzen
Rok vydání:	2013
Předmět:	Microelectromechanical systems Computer science business.industry Electrical engineering Motion sensing Gyroscope law.invention Robustness (computer science) law Nano Fluidics Actuator business Low voltage
Zdroj:	ECS Transactions. 50:119-131
ISSN:	1938-6737 1938-5862
DOI:	10.1149/05010.0119ecst
Popis:	Magnetic micro and nano actuators excel in robustness, achieve considerable travel at decent forces, and operate at low voltage. However, compared to electrostatic micro and nano actuators (their main competitors), they typically are more complex. Nevertheless, by now, there are substantial activities in the area of micro and nano actuator systems, many executed by universities. In the biomedical area, fluidic applications predominate. In the field of Computer and Communication Technology (CTT), the emphasis is in the area of MEMS RF switches/relays. In motion sensing, there are interesting activities in the area of yaw sensors, also called gyroscopes. Although sensing devices, they do require actuation. One of the fastest growing areas of magnetic MNEMS actuation is in the field of optics, with substantial activities in scanning mirrors.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6df02f3af9696f99aa4c0779fcf04fb0 https://doi.org/10.1149/05010.0119ecst Zobrazit plný text záznamu