High voltage devices added to A 0.13μm high resistivity thin SOI CMOS process for mixed analog-RF circuits
Autor: | L. Boissonnet, S. Chouteau, B. Reynard, O. Bon, C. Raynaud, A. Perrotin, O. Gonnard |
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Rok vydání: | 2006 |
Předmět: | |
Zdroj: | 2005 IEEE International SOI Conference Proceedings. |
DOI: | 10.1109/soi.2005.1563577 |
Popis: | We have added to a 0.13/spl mu/m thin SOI CMOS core process a high competitive SOI NLDEMOS which presents excellent power switch and analog characteristics. Measurements have demonstrated that both drift and BC design rules allow to obtain HV devices (BV > 15V) with a low S.Ron and a low leakage. |
Databáze: | OpenAIRE |
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