High voltage devices added to A 0.13μm high resistivity thin SOI CMOS process for mixed analog-RF circuits

Autor: L. Boissonnet, S. Chouteau, B. Reynard, O. Bon, C. Raynaud, A. Perrotin, O. Gonnard
Rok vydání: 2006
Předmět:
Zdroj: 2005 IEEE International SOI Conference Proceedings.
DOI: 10.1109/soi.2005.1563577
Popis: We have added to a 0.13/spl mu/m thin SOI CMOS core process a high competitive SOI NLDEMOS which presents excellent power switch and analog characteristics. Measurements have demonstrated that both drift and BC design rules allow to obtain HV devices (BV > 15V) with a low S.Ron and a low leakage.
Databáze: OpenAIRE