| Popis: |
A new sensor for aerodynamic research providing high dynamics as well as flow reversal detection is presented. The MEMS surface fence sensor consists of a 5mm long, 100–300 µm high and 7–10 µm thick silicon fence as well as a “body” for contacting and handling. In a flow, a pressure difference between both sides of the fence occurs and deflects it. Four piezoresistors, connected to a Wheatstone bridge, measure the deflection and transforms it into an electrical signal. Three different designs, the most sensitive of them allowing the detection of a wall-shear-stress below 20 mN/m2, are discussed. The device is fabricated using microfabrication processes and double side polished Si-wafers as base material. |
