Measuring the position and profile of an ion beam in systems with ‘R-theta’ scanning
Autor: | W.J. Szajnowski |
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Rok vydání: | 1993 |
Předmět: | |
DOI: | 10.1016/b978-0-444-89994-1.50095-8 |
Popis: | A method is presented to measure the position of an ion beam centroid. The method uses two precise nonlinear slits located in the plane of a spinning disk and a stationary Faraday cup mounted behind the disk. A beam centroid position is converted into a time interval which can be measured digitally. A beam profile flatness measure is also proposed to facilitate monitoring the stability of a beam current distribution in fully automated systems. |
Databáze: | OpenAIRE |
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