Increasing the Interferogram Sensitivity by Digital Holography
| Autor: | V. Yu. Venediktov, Nikolay V. Petrov, V. I. Shoev, I. M. Tursunov, D. V. Venediktov, N. S. Balbekin, Alexander Sevryugin, S. A. Pulkin, R. S. Konovalov |
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| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Physics Spatial light modulator business.industry Holography Condensed Matter Physics Holographic interferometry 01 natural sciences law.invention 010309 optics Interferometry Nanometrology Optics Interference (communication) law 0103 physical sciences Sensitivity (control systems) Electrical and Electronic Engineering business Instrumentation Digital holography |
| Zdroj: | Optoelectronics, Instrumentation and Data Processing. 56:190-197 |
| ISSN: | 1934-7944 8756-6990 |
| Popis: | This paper presents the results of experimental studies and digital methods for recording of holograms using spatial light modulators. The use of holographic interference methods for measuring nanoscale irregularities is described for the case of a nanostep (70 nm in height and 30 $$\mu$$ m in width). Examples are given of the method of increased sensitivity for nanostep measurements and the method of hooks using a digital technique. Correction of internal system distortions in the interferometer has been shown to be a workable method. The holographic interference methods with digital processing of holograms allows the sensitivity of interferograms to be increased without loss of basic information about the object and without increasing the measurement accuracy. |
| Databáze: | OpenAIRE |
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