Electromechanical Tuning of Piecewise Stiffness and Damping for Long-Range and High-Precision Piezoelectric Ultrasonic Transducers
Autor: | Paul-Vahe Cicek, Frederic Nabki, Dominic Deslandes, Alexandre Robichaud |
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Rok vydání: | 2020 |
Předmět: |
Materials science
Mechanical Engineering Acoustics 020208 electrical & electronic engineering Stiffness 02 engineering and technology 021001 nanoscience & nanotechnology Piezoelectricity Damper Shock absorber Transducer 0202 electrical engineering electronic engineering information engineering PMUT medicine Ultrasonic sensor Electrical and Electronic Engineering medicine.symptom 0210 nano-technology Actuator |
Zdroj: | Journal of Microelectromechanical Systems. 29:1189-1198 |
ISSN: | 1941-0158 1057-7157 2019-0123 |
DOI: | 10.1109/jmems.2020.3005917 |
Popis: | This paper presents a novel technique for quickly deactivating piezo-electric micromachined ultrasonic transducers (PMUT) in order to increase their potential for acoustic imaging. The proposed PMUT is anchored by four arms and surrounded by two mechanical dampers. The dampers are moved using electrostatic actuators in order to come into contact with the PMUT. By doing so, the resonant frequency of the PMUT can be shifted and the amplitude at the working frequency can be reduced. Measurement results show that this technique can effectively dampen the displacement of the PMUT. [2019-0123] |
Databáze: | OpenAIRE |
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