Fully-Flexible Micro-Scale Actuator Array with the Liquid-Gas Phase Change Materials

Autor:	Sangjun Sim, Kyubin Bae, Jongbaeg Kim
Rok vydání:	2023
Zdroj:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
DOI:	10.1109/mems49605.2023.10052525
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6d29a732636c0d7a345543d97f519a6c https://doi.org/10.1109/mems49605.2023.10052525 Zobrazit plný text záznamu