Performance Enhancement of In2O3 Thin-Film Transistors via Multi-Spin Coating Combined with UV-Assisted Thermal Annealing

Autor:	Shujian Chen, Yu Luo, Jun Liang, Yanli Pei
Rok vydání:	2022
Předmět:	Materials Chemistry Electrical and Electronic Engineering Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Journal of Electronic Materials. 51:6297-6304
ISSN:	1543-186X 0361-5235
DOI:	10.1007/s11664-022-09787-1
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6d0916af6135b18c00bcbd4c523539c2 https://doi.org/10.1007/s11664-022-09787-1 Zobrazit plný text záznamu Full text from SpringerLink