The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe 2 O 3 Using tert ‐Butylferrocene and O 3

Autor:	Jon G. Baker, Stacey F. Bent, Joel R. Schneider
Rok vydání:	2020
Předmět:	Ozone Materials science Mechanical Engineering Iron oxide food and beverages chemistry.chemical_element Oxygen Characterization (materials science) chemistry.chemical_compound Atomic layer deposition chemistry Chemical engineering Mechanics of Materials Phase (matter) Surface modification Thin film
Zdroj:	Advanced Materials Interfaces. 7:2000318
ISSN:	2196-7350
Popis:	This work demonstrates a mechanistic study of iron oxide deposited by ALD, revealing a growth mechanism involving uptake of superstoichiometric oxygen. Material characterization shows ozone exposure can be used to convert the crystallographic phase and domain orientation of the materials. This mechanism has implications for wider classes of ozone-based ALD processes and can generalize to other systems.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6cfdf8da3766ecc2fe9bfcd87c828252 https://doi.org/10.1002/admi.202000318 Zobrazit plný text záznamu Plný text