Thermalization of sputtered aluminium atoms in an electron cyclotron resonance plasma source

Autor:	N P Poluektov, I A Kamyschov, V N Kharchenko
Rok vydání:	2003
Předmět:	Argon chemistry Aluminium Krypton Analytical chemistry chemistry.chemical_element Light emission Plasma diagnostics Plasma Atomic physics Condensed Matter Physics Electron cyclotron resonance Doppler broadening
Zdroj:	Plasma Sources Science and Technology. 12:449-453
ISSN:	1361-6595 0963-0252
DOI:	10.1088/0963-0252/12/3/321
Popis:	The transverse temperature of sputtered aluminium atoms in an electron cyclotron resonance discharge has been calculated from the shapes of their Doppler broadening emission lines, which were measured with a pressure scanning Fabry–Perot interferometer. This temperature decreases from 0.8 to 0.28 eV at a distance of 17.5 cm from the Al target when krypton pressure rises from 0.4 to 4 mTorr. For a discharge in argon aluminium temperature falls from 0.5 to 0.18 eV for the same condition.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6cfa92ed33234d3803c577408c1fd78f https://doi.org/10.1088/0963-0252/12/3/321 Zobrazit plný text záznamu