Designing high quality test chips with improved coverage for design rule exploration, process variation improvement and hotspot discovery

Autor:	Yining Chen, Pang Guo, Joe Kwan, Aliaa Kabeel, Sarah Rizk, Chunshan Du, Xinyi Hu, Qijian Wan, Xizi Yan
Rok vydání:	2022
Zdroj:	2022 International Workshop on Advanced Patterning Solutions (IWAPS).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6ce1f91749d808ef83c48810f2b57cc0 https://doi.org/10.1109/iwaps57146.2022.9972262 Zobrazit plný text záznamu