Cell Oxide TDDB (Time Dependent Dielectric Breakdown) in Saddle FinFET

Autor:	Ching Hua Chen, Ssu-yu Liu, Tsai Sung Yuan, Tai Hsin, Huang Sheng Hui, Shi Xin Jian, Enoch Rufus Young, Hung Shen Pai, Chiu Tsung Huang, Chiu Ching Kang
Rok vydání:	2021
Zdroj:	2021 16th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT).
DOI:	10.1109/impact53160.2021.9696767
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6cd0169158af1d7810fe9b4ea62e985c https://doi.org/10.1109/impact53160.2021.9696767 Zobrazit plný text záznamu