Lateral MEMS-Type Field Emission Electron Source
| Autor: | Anna Gorecka-Drzazga, Tomasz Grzebyk, Piotr Szyszka, Jan Dziuban |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
Silicon Physics::Instrumentation and Detectors Analytical chemistry Micropump chemistry.chemical_element 02 engineering and technology 01 natural sciences law.invention law 0103 physical sciences Electrical and Electronic Engineering 010302 applied physics business.industry Vacuum arc 021001 nanoscience & nanotechnology Cathode Electronic Optical and Magnetic Materials Field electron emission chemistry Cathode ray Vacuum pump Optoelectronics Vacuum chamber 0210 nano-technology business |
| Zdroj: | IEEE Transactions on Electron Devices. 63:809-813 |
| ISSN: | 1557-9646 0018-9383 |
| DOI: | 10.1109/ted.2015.2506778 |
| Popis: | This paper describes a microelectromechanical-system-type field emission electron source fabricated as a planar silicon structure bonded with a glass substrate. It consists of a carbon nanotube cathode, beam formation electrodes, and silicon glass vacuum housing, all made in a uniform technological process. The current–voltage characteristics obtained inside a reference vacuum chamber for the two-, three-, and four-electrode configurations have been presented. The possibility of generation of a focused electron beam as well as gas ionization has been investigated. In addition, the lateral electron source has been integrated on the chip with a miniature ion-sorption vacuum pump and hermetically sealed. The use of the micropump significantly improved the stability of field emission current. |
| Databáze: | OpenAIRE |
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