Systematic Fabrication of (Ba, Sr)TiO3Microdots with Various Ba/Sr Ratios by Ink-Jet Printing and Their Evaluation

Autor: Tadashi Shiosaki, Soichiro Okamura, Hiromi Shima, Hiroshi Naganuma, Junji Musha
Rok vydání: 2007
Předmět:
Zdroj: Ferroelectrics. 357:3-8
ISSN: 1563-5112
0015-0193
Popis: Systematic fabrication of (Ba, Sr)TiO 3 microdots with different compositions was examined by ink-jet printing from two precursor solutions for BaTiO 3 and SrTiO 3 , and subsequent heat treatment at 700°C. The microdots were prepared by 40-times-overlapped discharging of the precursor solutions, and the composition of each microdot was adjusted by changing the shot number ratios of the two solutions. Relatively flat microdots with a width of approximately 100 μm and a thickness of approximately 1 μm were formed by depositing self-assembled monolayer films on the substrate surface before discharge. Finally, 41 types of (Ba, Sr)TiO 3 microdots with different compositions were successfully fabricated simultaneously on a Pt/Ti/SiO 2 /Si substrate, and the microdots were confirmed by Raman spectroscopy to have structures corresponding to the Ba/Sr ratios.
Databáze: OpenAIRE