SEM Observation at High Magnification and EDX Analysis of Insulating Sample by Diluted Ionic Liquid

Autor:	Masahiro Ichida, Jun Kawai, Long Ze, Susumu Imashuku
Rok vydání:	2011
Předmět:	chemistry.chemical_compound Materials science chemistry Sputtering Scanning electron microscope Sample (material) Ionic liquid Acetone Analytical chemistry chemistry.chemical_element Magnification Quantitative analysis (chemistry) Sulfur
Zdroj:	Hyomen Kagaku. 32:659-663
ISSN:	1881-4743 0388-5321
DOI:	10.1380/jsssj.32.659
Popis:	A few micro liters of 10-2 wt.% ionic liquid diluted by ethanol or acetone dropped onto insulating samples made it possible to observe scanning electron microscope (SEM) image at 5000 magnification, which is as clear as Pt-Pd sputtering. SEM-EDX analysis of sulfur is possible when using sulfur-free ionic liquid diluted down to 10-2 wt.%. Quantitative analysis using the ZAF method is also possible for insulating samples.
Databáze:	OpenAIRE
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