Leakage Current Minimization of Tio2-Based Metal–Insulator–Metal Capacitors Using High-Work-Function In2o3 and V2o5 Ultrathin Interlayers

Autor:	Jae Jin Chung, Seon Jung Kim, Jae Won Shim
Rok vydání:	2022
Předmět:	History Polymers and Plastics Business and International Management Industrial and Manufacturing Engineering
Zdroj:	SSRN Electronic Journal.
ISSN:	1556-5068
DOI:	10.2139/ssrn.4142110
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6c342e914291bedaa84428f1d9452d2c https://doi.org/10.2139/ssrn.4142110 Zobrazit plný text záznamu