Investigation of Temperature Characteristics of Carbon-Nanotube-Based-Gas Sensors with Through-Silicon-Via Technology

Autor:	Sung-Kyu Kwon, Hi-Deok Lee, Ga-Won Lee, Hyeong-Sub Song, So-Yeong Kim, Sung-Man Lee, Jeongchan Lee
Rok vydání:	2018
Předmět:	Materials science Through-silicon via law General Materials Science Nanotechnology Carbon nanotube law.invention
Zdroj:	Nanoscience and Nanotechnology Letters. 10:1283-1286
ISSN:	1941-4900
DOI:	10.1166/nnl.2018.2780
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6beb4988997550b01cbf8fc486a88ac0 https://doi.org/10.1166/nnl.2018.2780 Zobrazit plný text záznamu