Autor:	Su-Il Pyun, S.-J. Orr
Rok vydání:	1999
Předmět:	Working electrode Carbon film Materials science Chemical engineering Hybrid physical-chemical vapor deposition Plasma-enhanced chemical vapor deposition Ion plating Analytical chemistry General Materials Science Thin film Combustion chemical vapor deposition Electron beam physical vapor deposition
Zdroj:	Journal of Materials Science Letters. 18:591-594
ISSN:	0261-8028
DOI:	10.1023/a:1006664214945
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6bdbf7c936dbe25c85bd6266bec014df https://doi.org/10.1023/a:1006664214945 Zobrazit plný text záznamu Full text from SpringerLink