High-Endurance (>1011cycles) and Thermally-Stable Sub-100nm TiO2 Channel FeFET for Low-Power Memory Centric 3D-LSI Applications

Autor: Taro Shiokawa, Reika Ichihara, Takamasa Hamai, Kiwamu Sakuma, Kota Takahashi, Kazuhiro Matsuo, Masumi Saitoh
Rok vydání: 2023
Zdroj: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
Databáze: OpenAIRE