Inductive instruments for measuring the diameters of deep holes

Autor:	I. V. Karpovich, A. I. Knyazhitskii, M. I. Étingof
Rok vydání:	1996
Předmět:	Optics Materials science business.industry Applied Mathematics business Instrumentation
Zdroj:	Measurement Techniques. 39:617-619
ISSN:	1573-8906 0543-1972
DOI:	10.1007/bf02369825
Popis:	An instrument is described for measuring hole diameters from 28 to 56 nm, with depths up to 2500 mm. The measurements are made by comparison with a standard.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6ba7f95d92ed163c4989a5ceb37e2e40 https://doi.org/10.1007/bf02369825 Zobrazit plný text záznamu Full text from SpringerLink