| Autor: |
Teruo Usami, Nobuaki Konno, Yuji Ariyoshi, Hiroyuki Fujita, Masahiro Tsugai |
| Rok vydání: |
2001 |
| Předmět: |
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| Zdroj: |
Transducers ’01 Eurosensors XV ISBN: 9783540421504 |
| DOI: |
10.1007/978-3-642-59497-7_109 |
| Popis: |
We report a prototype of a triple axis angular rate sensor based on a double gimbal structure with a link beam drive mechanism, which can be operated without vacuum packaging. The principle of this rate sensor is based upon the torsional reference vibration of an outer gimbal generated by a PZT plate through link beams, and triple axis rate detections by piezoresistive four-terminal elements located on the tortional beams supporting each rate-sensitive inertial mass within the outer driven gimbal. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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